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Science/Engineering Statistical Mechanics, Third Edition
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Science/Engineering Reviews of Environmental Contamination and Toxicology 184 by George W. Ware

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Science/Engineering Wafer Level 3-D ICs Process Technology

Posted on 2010-03-16




Name:Science/Engineering Wafer Level 3-D ICs Process Technology
ASIN/ISBN:0387765328
Language:English
File size:11.1 Mb
Publish Date: 2008
ISBN: 0387765328
Pages: 410 pages
File Type: PDF
File Size: 11,1 MB
Other Info: Springer
   Science/Engineering Wafer Level 3-D ICs Process Technology

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Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif, "Wafer Level 3-D ICs Process Technology"

This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging.

This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.

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