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Science/Engineering Silicon Processing for the VLSI Era, Vol. 2: Process Integration

Posted on 2010-03-15




Name:Science/Engineering Silicon Processing for the VLSI Era, Vol. 2: Process Integration
ASIN/ISBN:0961672145
Language:English
File size:40 Mb
Publisher: Lattice Press
Pages: 752
Publish Date: 1990-03
ISBN: 0961672145
File Type: PDF
File Size: 40 MB
   Science/Engineering Silicon Processing for the VLSI Era, Vol. 2: Process Integration

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Silicon Processing for the VLSI Era, Vol. 2: Process Integration

"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor processing and nano-fabrication in existence. Practical processing techniques as well as their underlying fundamental principles are thoroughly covered in detail. This book has been indispensable to me during my graduate education and has the solution to just about every fabrication problem I have encountered in my 5+ years of experience. I highly recommend this book to anyone who is trying to build a semiconductor device or just curious about how such things are done.

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