Science/Engineering Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies (0387367985)

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Science/Engineering Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

Posted on 2010-03-15

Name:	Science/Engineering Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
ASIN/ISBN:	0387367985
Language:	English
File size:	9.8 Mb
Publish Date:	2009-01-09
ISBN:	0387367985
Pages:	624 pages
File Type:	PDF
File Size:	9,8 MB
Other Info:	Springer

Science/Engineering Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

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Badih El-Kareh, "Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies"

"Silicon Devices and Process Integration" is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It is also suitable for a one-semester course in electrical engineering and materials science at the upper undergraduate or lower graduate level. The book covers both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions.

Topics covered include: MOS structure, parameter extraction - Short and narrow-channel effects - CMOS mobility enhancement techniques - High-K gate dielectrics, advanced gate stacks - Low-K dielectrics and Cu interconnects - Analog devices and passive components - CMOS and BiCMOS process integration - DRAM, SRAM and NVM cell structures.

The book covers state-of-the-art silicon devices and integrated process technologies. It represents a comprehensive discussion of modern silicon devices, their characteristics, and interactions with process parameters.

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	Science/Engineering Silicon Processing for the VLSI Era, Vol. 2: Process Integration Silicon Processing for the VLSI Era, Vol. 2: Process Integration Publisher: Lattice Press \| Pages: 752 \| 1990-03 \| ISBN 0961672145 \| PDF \| 40 MB"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor p ...
	Science/Engineering Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology Publisher:Lattice Press \| Pages: 822 \| 2002-05 \| ISBN 096167217X \| PDF \| 68 MBThis well written reference book is highly recommended to anyone interested in the ...
	Advanced Materials and Technologies for Micro/Nano-Devices, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and ActuatorsSpringer \| 2010 \| ISBN: 9048138051 \| 313 pages \| PDF \| 35,9 MBThe main goal of this book is to review recent progress and current status of MEMS/NEMS techn ...
	Science/Engineering Robust Computing with Nano-scale Devices: Progresses and Challenges Chao Huang, "Robust Computing with Nano-scale Devices: Progresses and Challenges" Springer \| 2010 \| ISBN: 9048185394 \| 200 pages \| PDF \| 2,2 MB Robust Nano-Computing focuses on various issues of robust nano-computing, defect-tolerance d ...
	Springer Robust Computing With Nano Scale Devices (Mar 2010)
	Robust Computing with Nano-scale Devices Title: Robust Computing with Nano-scale Devices: Progresses and ChallengesAuthor: Chao HuangPublish date: March 26, 2010Format: PDFLanguage: EnglishSize: 2.61 MBISBN-10: 9048185394Description:Robust Nano-Computing focuses on various ...

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	Science/Engineering Silicon Processing for the VLSI Era, Vol. 2: Process Integration Silicon Processing for the VLSI Era, Vol. 2: Process Integration Publisher: Lattice Press \| Pages: 752 \| 1990-03 \| ISBN 0961672145 \| PDF \| 40 MB"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor p ...
	Science/Engineering Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology Publisher:Lattice Press \| Pages: 822 \| 2002-05 \| ISBN 096167217X \| PDF \| 68 MBThis well written reference book is highly recommended to anyone interested in the ...
	Advanced Materials and Technologies for Micro/Nano-Devices, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and ActuatorsSpringer \| 2010 \| ISBN: 9048138051 \| 313 pages \| PDF \| 35,9 MBThe main goal of this book is to review recent progress and current status of MEMS/NEMS techn ...
	Science/Engineering Robust Computing with Nano-scale Devices: Progresses and Challenges Chao Huang, "Robust Computing with Nano-scale Devices: Progresses and Challenges" Springer \| 2010 \| ISBN: 9048185394 \| 200 pages \| PDF \| 2,2 MB Robust Nano-Computing focuses on various issues of robust nano-computing, defect-tolerance d ...
	Springer Robust Computing With Nano Scale Devices (Mar 2010)
	Robust Computing with Nano-scale Devices Title: Robust Computing with Nano-scale Devices: Progresses and ChallengesAuthor: Chao HuangPublish date: March 26, 2010Format: PDFLanguage: EnglishSize: 2.61 MBISBN-10: 9048185394Description:Robust Nano-Computing focuses on various ...

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