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Physics Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits, and Applications of SiGe and Si Strained-Layer Epitaxy
Posted on 2010-09-30
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While the idea of cleverly using silicon–germanium (SiGe) and silicon (Si) strained-layer epitaxy to practice bandgap engineering of semiconductor devices in the highly manufacturable Si material system is an old one, only in the past decade has this concept become a practical reality. The final success of creating novel Si heterostructure transistors with performance far superior to their Si-only homojunction cousins, while maintaining strict compatibility with the massive economy-of-scale of conventional Si integrated circuit manufacturing, proved challenging and represents the sustained efforts of literally thousands of physicists, electrical engineers, material scientists, chemists, and technicians across theworld. In the electronics domain, the fruit of that global effort is SiGe heterojunction bipolar transistor (SiGe HBT) BiCMOS technology, and strained Si/SiGe CMOS technology, both of which are at present in commercial manufacturing worldwide and are rapidly finding a number of important circuit and system applications. As with any new integrated circuit technology, the industry is still actively exploring device performance and scaling limits (at present well above 300 GHz in frequency response, and rising), new circuit applications and potential new markets, as well as a host of novel device and structural innovations. This commercial success in the electronics arena is also spawning successful forays into the optoelectronics and even nanoelectronics fields. The Si heterostructure field is both exciting and dynamic in its scope.
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