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Science/Engineering Reactive Sputter Deposition

Posted on 2010-03-15




Name:Science/Engineering Reactive Sputter Deposition
ASIN/ISBN:3540766626
Language:English
File size:14.6 Mb
Publish Date: 2008-04-24
ISBN: 3540766626
Pages: 572 pages
File Type: PDF
File Size: 14,6 MB
Other Info: Springer
   Science/Engineering Reactive Sputter Deposition

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Diederik Depla, Stijn Mahieu “Reactive Sputter Deposition"

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

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