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Science/Engineering Handbook of Sputter Deposition Technology: Principles, Technology and Applications
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 | Handbook of Chemical Vapor Deposition, Second Edition : Principles, Technologies and Applications Hugh O. Pierson "Handbook of Chemical Vapor Deposition"Noyes Publications | September 1999 | ISBN: 0815514328 | 482 pages | PDF | ~3MB“Reviews in depth the recent expansion of the number of materials produced by CVD; copper, tungsten, ... |
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