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Science/Engineering Microengineering, MEMS, and Interfacing

Posted on 2010-03-15




Name:Science/Engineering Microengineering, MEMS, and Interfacing
ASIN/ISBN:0824723058
Language:English
File size:33 Mb
   Science/Engineering Microengineering, MEMS, and Interfacing

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Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.

Book Info:

Published in 2006

Author Danny Banks

ISBN 0824723058 Size 13.80MB

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