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Science/Engineering Danny Banks, ?Microengineering, MEMS, and Interfacing?

Posted on 2010-03-15




Name:Science/Engineering Danny Banks, ?Microengineering, MEMS, and Interfacing?
ASIN/ISBN:0824723058
Language:English
File size:13.8 Mb
ISBN: 0824723058
Publish Date: March 23, 2006
File Type: PDF
Pages: 352 Pages
File Size: 13.8 MB
Other Info: CRC
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Danny Banks, ?Microengineering, MEMS, and Interfacing?

Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.

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