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Micro and Nano Manufacturing

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. "Micro and Nanomanufacturing" provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; and the deposition of thin films, pulsed water drop machining, and nanomachining. Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

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	Technical Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengine Author: Sergey Edward LyshevskiPublisher: CRC PressPublish Date: 28 September, 2000ISBN: 0849309166
	Science/Engineering Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering 2nd ed.
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	Study The Nano-Micro Interface: Bridging the Micro and Nano Worlds Hans-Jörg Fecht, Matthias Werner, "The Nano-Micro Interface: Bridging the Micro and Nano Worlds" Wiley \| 2005 \| ISBN: 3527309780 \| 351 pages \| PDF \| 17,1 MB Two exciting worlds of science and technology - the nano and micro dimensions. T ...
	Science/Engineering Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineeringCRC Press \| 2005 \| ISBN 0849328381 \| 345 pages \| PDF \| 8.14MBThis book is designed for a one-semester course on Nano- and Microelectromechani ...

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