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Science/Engineering Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering

Posted on 2010-03-16




Name:Science/Engineering Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering
ASIN/ISBN:0849328381
Language:English
File size:15.26 Mb
Publish Date: 2005
ISBN: 0849328381
Pages: 345 pages
File Type: PDF
Other Info: CRC Press; 8.14MB
   Science/Engineering Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering



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Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering

This book is designed for a one-semester course on Nano- and Microelectromechanical Systems or Nano- and Microengineering. A typical background needed includes calculus, electromagnetics, and physics. The purpose of this book is to bring together in one place the various methods, techniques, and technologies that students and engineers need in solving a wide array of engineering problems in formulation, modeling, analysis, design, and optimization of high-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). This book is not intended to cover fabrication aspects and technologies because a great number of books are available. At the same time, extremely important issues in analysis, design, modeling, optimization, and simulation of NEMS and MEMS have not been comprehensively covered in the existing literature.

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