English
Deutsch
Français
简体中文
繁體中文
Categories
-- Database/SQL
-- Multimedia
-- Internet/Networking
-- Operating System
-- Programming
-- Security/Hacking
-- Science/Engineering
-- Web/HTML/CSS/Ajax
-- Unix/Linux
-- Windows
-- Mac OS X
-- Office
-- Perl/PHP/Python
-- C/C++/C#
-- .NET
-- Java
-- Hardware
-- Game Development
-- Embedded Systems
-- Graphics and Design
-- Network Programming
Study
Novel
Nonfiction
Health
Tutorial
Entertainment
Business
Magazine
Arts & Design
Audiobooks & Video Training
Cultures & Languages
Family & Home
Law & Politics
Lyrics & Music
Software Related
eBook Torrents
Uncategorized
Share With Friends
Archive by Date
2012-08-05
2012-08-04
2012-08-03
2012-08-02
2012-08-01
2012-07-31
2012-07-30
2012-07-29
2012-07-28
Search Tag
Newest
Science/Engineering Essentials of Toxic Chemical Risk: Science and Society
Science/Engineering Telefoncoaching: So machen Sie aus Ihren Mitarbeitern Telefonprofis
Science/Engineering Wireless Communications (Wiley - IEEE)
Science/Engineering Posttraumatische Belastungsstörungen (German Edition)
Science/Engineering Lernplattformen in Schulen: Ansätze für E-Learning und Blended Learning in Präsenzklassen (1 Auflage)
Science/Engineering Stochastik für Einsteiger: Eine Einführung in die faszinierende Welt des Zufalls. Mit über 220 Übungsaufgaben und Lösungen {Repost}
Science/Engineering Testtheorie und Fragebogenkonstruktion (Springer-Lehrbuch)
Science/Engineering Centrifugal Pumps, 2nd Edition
Science/Engineering Computational Intelligence for Modelling and Prediction (Studies in Computational Intelligence) 1 edition {Repost}
Science/Engineering Networks, Crowds, and Markets: Reasoning About a Highly Connected World {repost}
Science/Engineering Introduction to Biophotonics (repost)
Science/Engineering The Art and Science of Psychotherapy (repost)
Science/Engineering Advances in Chemical Physics - Volume 15: Stochastic Processes in Chemical Physics
Science/Engineering "Emulsion Science: Basic Principles" (repost)
Science/Engineering Elementary Principles of Chemical Processes 3rd edition
Science/Engineering Boundary Element Analysis (repost)
Science/Engineering Collection of books on physics 2
Science/Engineering A Practical Handbook of Preparative HPLC by Donald A. Wellings (Repost)
Science/Engineering Reviews of Environmental Contamination and Toxicology 184 by George W. Ware
Useful Links
Science/Engineering Handbook of VLSI Microlithography
Posted on 2010-03-16
|  |
More Handbook of VLSI Microlithography This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. My Links To thank me use my links, please!
Rating:
2.5 out of 5 by Book123 |
| Download Links | |
| Server | Status |
|---|---|
| Direct Download Link 1 | Alive |
| Direct Download Link 2 | Alive |
| Download Link (Download) | Alive |
| Download Link (Mirror) | Alive |
| Download Link (Mirror) | Alive |
| Download Link (Mirror) | Alive |
|
Buy This Book at Best Price >> | |
Related Articles
 | Technical The VLSI Handbook Author: Wai-Kai ChenPublisher: CRC PressPublish Date: 22 December, 1999ISBN: 0849385938 |
 | Technical VLSI Handbook by Wai-fah Chen - 1999 Very Large Scale Integration Handbookby Wai-fah Chen ISBN: 0849385938 |
 | Study The VLSI Handbook, Second Edition (Electrical Engineering Handbook) pic info:2007-05-18/tvhse_origThe VLSI Handbook, 2nd Edition (Electrical Engineering Handbook)CRC Press | ISBN: 084934199X | 2006. | 2322 p. | RARed | PDF | 34.3MBWe are most gratified to find that the first edition of The VLSI Handbook (20 ... |
 | Science/Engineering Principles of CMOS VLSI Design, 1st Edition, 1985 (VLSI systems series) Principles of CMOS VLSI Design, 1st Edition, 1985 (VLSI systems series) By N. Weste, Kamran Eshraghian,Publisher: Addison Wesley Longman Publishing CoNumber Of Pages: 534Publication Date: 1985-07Sales Rank: 1531094ISBN / ASIN: 020 ... |
| Science/Engineering The VLSI Handbook,2 Ed (Electrical Engineering Handbook) Wai-Kai Chen, "The VLSI Handbook,2 Ed (Electrical Engineering Handbook)" CRC; 2 ed | 2006 | ISBN: 084934199X | 2320 pages | PDF | 42,7 MB At the cusp of the last century, Wai-Kai Chen introduced a monumental reference for the design, an ... |
 | Science/Engineering Handbook of VLSI Micrelithography Marc, "Handbook of VLSI Micrelithography" William Andrew; 2 ed | 2001 | ISBN: 0815514441 | 995 pages | PDF | 5,9 MB This handbook gives readers a close look at the entire technology of printing very high resolution and high density inte ... |
Comments (0)
