Categories
Technical
-- Database/SQL
-- Multimedia
-- Internet/Networking
-- Operating System
-- Programming
-- Security/Hacking
-- Science/Engineering
-- Web/HTML/CSS/Ajax
-- Unix/Linux
-- Windows
-- Mac OS X
-- Office
-- Perl/PHP/Python
-- C/C++/C#
-- .NET
-- Java
-- Hardware
-- Game Development
-- Embedded Systems
-- Graphics and Design
-- Network Programming
Study
Novel
Nonfiction
Health
Tutorial
Entertainment
Business
Magazine
Arts & Design
Audiobooks & Video Training
Cultures & Languages
Family & Home
Law & Politics
Lyrics & Music
Software Related
eBook Torrents
Uncategorized
-- Database/SQL
-- Multimedia
-- Internet/Networking
-- Operating System
-- Programming
-- Security/Hacking
-- Science/Engineering
-- Web/HTML/CSS/Ajax
-- Unix/Linux
-- Windows
-- Mac OS X
-- Office
-- Perl/PHP/Python
-- C/C++/C#
-- .NET
-- Java
-- Hardware
-- Game Development
-- Embedded Systems
-- Graphics and Design
-- Network Programming
Study
Novel
Nonfiction
Health
Tutorial
Entertainment
Business
Magazine
Arts & Design
Audiobooks & Video Training
Cultures & Languages
Family & Home
Law & Politics
Lyrics & Music
Software Related
eBook Torrents
Uncategorized
Share With Friends
Archive by Date
2012-08-06
2012-08-05
2012-08-04
2012-08-03
2012-08-02
2012-08-01
2012-07-31
2012-07-30
2012-07-29
2012-07-28
2012-08-05
2012-08-04
2012-08-03
2012-08-02
2012-08-01
2012-07-31
2012-07-30
2012-07-29
2012-07-28
Search Tag
discovery
Tarde
Birch
Unexplored
Gierling
Dropshippers
Zhongfeng
Alamein
Paula
serie
排毒吧,大脑
Foodservice
Halbjahres
Comleted
Tivoli
Laeckberg
Tobalina
RAPISHARE
Positioning
Hygienic
Minoru
Himmels
Widening
Harmonicopia
Leatherface
Sterk
Wetlands
Pano2VR
Dressing
Tarsus
tenth
Outrageous
BioShock
Barbie
1076
Scoop
LYRICS
Cocteau
EvoArticles
Hollyday
AIAA
Sedation
Gramham
closed
Baltics
Gnome
Boltzmann
Bononcini
Angelika
Trousers
Newest
Science/Engineering Statistical Mechanics, Third Edition
Science/Engineering Essentials of Toxic Chemical Risk: Science and Society
Science/Engineering Telefoncoaching: So machen Sie aus Ihren Mitarbeitern Telefonprofis
Science/Engineering Wireless Communications (Wiley - IEEE)
Science/Engineering Posttraumatische Belastungsstörungen (German Edition)
Science/Engineering Lernplattformen in Schulen: Ansätze für E-Learning und Blended Learning in Präsenzklassen (1 Auflage)
Science/Engineering Stochastik für Einsteiger: Eine Einführung in die faszinierende Welt des Zufalls. Mit über 220 Übungsaufgaben und Lösungen {Repost}
Science/Engineering Testtheorie und Fragebogenkonstruktion (Springer-Lehrbuch)
Science/Engineering Centrifugal Pumps, 2nd Edition
Science/Engineering Computational Intelligence for Modelling and Prediction (Studies in Computational Intelligence) 1 edition {Repost}
Science/Engineering Networks, Crowds, and Markets: Reasoning About a Highly Connected World {repost}
Science/Engineering Introduction to Biophotonics (repost)
Science/Engineering The Art and Science of Psychotherapy (repost)
Science/Engineering Advances in Chemical Physics - Volume 15: Stochastic Processes in Chemical Physics
Science/Engineering "Emulsion Science: Basic Principles" (repost)
Science/Engineering Elementary Principles of Chemical Processes 3rd edition
Science/Engineering Boundary Element Analysis (repost)
Science/Engineering Collection of books on physics 2
Science/Engineering A Practical Handbook of Preparative HPLC by Donald A. Wellings (Repost)
Science/Engineering Reviews of Environmental Contamination and Toxicology 184 by George W. Ware
Science/Engineering Essentials of Toxic Chemical Risk: Science and Society
Science/Engineering Telefoncoaching: So machen Sie aus Ihren Mitarbeitern Telefonprofis
Science/Engineering Wireless Communications (Wiley - IEEE)
Science/Engineering Posttraumatische Belastungsstörungen (German Edition)
Science/Engineering Lernplattformen in Schulen: Ansätze für E-Learning und Blended Learning in Präsenzklassen (1 Auflage)
Science/Engineering Stochastik für Einsteiger: Eine Einführung in die faszinierende Welt des Zufalls. Mit über 220 Übungsaufgaben und Lösungen {Repost}
Science/Engineering Testtheorie und Fragebogenkonstruktion (Springer-Lehrbuch)
Science/Engineering Centrifugal Pumps, 2nd Edition
Science/Engineering Computational Intelligence for Modelling and Prediction (Studies in Computational Intelligence) 1 edition {Repost}
Science/Engineering Networks, Crowds, and Markets: Reasoning About a Highly Connected World {repost}
Science/Engineering Introduction to Biophotonics (repost)
Science/Engineering The Art and Science of Psychotherapy (repost)
Science/Engineering Advances in Chemical Physics - Volume 15: Stochastic Processes in Chemical Physics
Science/Engineering "Emulsion Science: Basic Principles" (repost)
Science/Engineering Elementary Principles of Chemical Processes 3rd edition
Science/Engineering Boundary Element Analysis (repost)
Science/Engineering Collection of books on physics 2
Science/Engineering A Practical Handbook of Preparative HPLC by Donald A. Wellings (Repost)
Science/Engineering Reviews of Environmental Contamination and Toxicology 184 by George W. Ware
Useful Links
Science/Engineering Handbook of VLSI Micrelithography
Posted on 2010-03-16
|
More Marc, "Handbook of VLSI Micrelithography" This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process pattern transfer coatings -- including optical lithography, electron-beam, ion-beam, and X-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting affect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron- microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging X-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook. Key Features: - Explains the technology behind lithographic aligner tools, from UV steppers to e-beam tools, to exotic ion-beam and X-ray - Provides rarely published data on automation of tools along with basic vibrational analysis principles - Includes sections on product development, economic factors, marketing, and current semiconductor fab status - Covers the entire field and all pattern printing options, comparing one technology with another - Practical -- helps engineers choose among various lithographic technologies to use for specific applications Only ONE (1) RS mirror, please RS mirror:
Rating:
2.5 out of 5 by Book123 |
Download Links | |
Server | Status |
---|---|
Direct Download Link 1 | Alive |
Direct Download Link 2 | Alive |
uploading.com | Alive |
depositfiles.com | Alive |
Download Link (Download Link 1) | Alive |
Buy This Book at Best Price >> |
Like this article?! Give us +1: