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Science/Engineering Handbook of Semiconductor Manufacturing Technology (Repost)

Posted on 2010-03-16




Name:Science/Engineering Handbook of Semiconductor Manufacturing Technology (Repost)
ASIN/ISBN:1574446754
Language:English
File size:68.97 Mb
Publisher: CRC; 2 edition
Publish Date: 2007
Pages: 1702 Pages
ISBN: 1574446754
File Type: PDF
File Size: 68.97 MB
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Handbook of Semiconductor Manufacturing Technology

By Robert Doering, Yoshio Nishi


& 8220;Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies

In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on…

Silicon-on-insulator (SOI) materials and devices

Supercritical CO2 in semiconductor cleaning

Low-κ dielectrics

Atomic-layer deposition

Damascene copper electroplating

Effects of terrestrial radiation on integrated circuits (ICs)

Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

& 8221;

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