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Semiconductor Materials and Process Technology Handbook

Posted on 2010-03-16




Name:Semiconductor Materials and Process Technology Handbook
ASIN/ISBN:0815511507
Language:English
File size:34 Mb
Publish Date: 1989-01-14
ISBN: 0815511507
Pages: 688 pages
File Type: PDF
File Size: 34 MB
Other Info: William Andrew
   Semiconductor Materials and Process Technology Handbook

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Gary F. McGuire, "Semiconductor Materials and Process Technology"

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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