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Science/Engineering William S. Rees - CVD of Nonemetals

Posted on 2010-03-16




Name:Science/Engineering William S. Rees - CVD of Nonemetals
ASIN/ISBN:3527292950
Language:English
File size:19.67 Mb
Publish Date: 1996
ISBN: 3527292950
Pages: 424
File Type: PDF
File Size: 19.67 MB
Other Info: Wiley-VCH
   Science/Engineering William S. Rees - CVD of Nonemetals

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William S. Rees - CVD of Nonemetals

Written by leading experts in the field, this practical reference handbook offers an up-to-date, critical survey of the chemical vapour deposition (CVD) of nonmetals, a key technology in semiconductor electronics, finishing, and corrosion protection. The basics necessary for any CVD process are discussed in the introduction. In the following chapters, precursor requirements, with an emphasis on materials chemistry, common structures of reactants and substrates, as well as reaction control are discussed for a broad range of compounds. Technological issues are assessed and the viability of the method, both technically and economically, is compared with other techniques for the preparation of thin films. Relevant materials and technical data are collected in tables throughout. An extensive glossary, list of abbreviations and acronyms, and over 1400 references round off this impressive work.

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