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Technical Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics)

Posted on 2010-04-13




Name:Technical Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics)
ASIN/ISBN:3540445005
Author:onno
Language:English
File size:15.6 Mb
   Technical Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics)





ISBN: 3540445005 Publisher: Springer Author: Rainer Behrisch

Description:

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident

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