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Science/Engineering Silicon Carbide Microel Ectromechanical Systems for Harsh Environments

Posted on 2010-03-16




Name:Science/Engineering Silicon Carbide Microel Ectromechanical Systems for Harsh Environments
ASIN/ISBN:1860946240
Language:English
File size:8.68 Mb
ISBN: 1860946240
Publish Date: 2006
File Type: PDF
Pages: 192 pages
File Size: 8.68 MB
Other Info: Imperial College Press
   Science/Engineering Silicon Carbide Microel Ectromechanical Systems for Harsh Environments

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Rebecca Cheung, «Silicon Carbide Microel Ectromechanical Systems for Harsh Environments»

& 8220; This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. & 8221;

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