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Science/Engineering Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Posted on 2010-03-16




Name:Science/Engineering Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
ASIN/ISBN:3540221093
Language:English
File size:7.8 Mb
Language: English
Publish Date: 2004-11-23
ISBN: 3540221093
Pages: 221 pages
File Type: PDF
File Size: 7,8 MB
Other Info: Springer
   Science/Engineering Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures



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Joachim Frühauf "Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures"

This manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. A systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications is given. It includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. Especially written for producers of sensors and microtechnical components. it serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon.

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