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Physics Selected Papers on Resolution Enhancement Techniques in Optical Lithography

Posted on 2010-03-16




Name:Physics Selected Papers on Resolution Enhancement Techniques in Optical Lithography
ASIN/ISBN:9780819451668
Author:F. M. Schellenberg
Publisher:(SPIE Press Book
Publish Date:11 March 2004
Language:English
File size:50 Mb
   Physics Selected Papers on Resolution Enhancement Techniques in Optical Lithography

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  • Author: F. M. Schellenberg
  • Publisher: (SPIE Press Book
  • Publish Date: 11 March 2004
  • ISBN: 9780819451668
Optical lithography for integrated circuits is undergoing a renaissance with the adoption of resolution enhancement techniques (RET). Some RET concepts have become routine in manufacturing, almost two decades after the original applications were conceived. This volume gathers together seminal RET papers. Since many of the first applications were announced by Japanese authors well before the material was presented in English, some of the original Japanese papers are included plus their English translations.
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