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Plasma Electronics: Applications in Microelectronic Device Fabrication

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma.

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	Science/Engineering Force Sensors for Microelectronic Packaging Applications J. Schwizer, M. Mayer, O. Brand , "Force Sensors for Microelectronic Packaging Applications"Springer; 1 edition (November 23, 2004) \| ISBN:3540221875 \| 178 pages \| PDF \| 15,9 Mb Mirror -> Mirror:
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	Science/Engineering Force Sensors for Microelectronic Packaging Applications J. Schwizer, M. Mayer, O. Brand , "Force Sensors for Microelectronic Packaging Applications"Springer; 1 edition (November 23, 2004) \| ISBN:3540221875 \| 178 pages \| PDF \| 15,9 Mb Mirror -> Mirror:
	Science/Engineering The Science and Engineering of Microelectronic Fabrication Stephen A. Campbell “The Science and Engineering of Microelectronic Fabrication" Oxford University Press, USA \| 2001-02-15 \| ISBN: 0195136055 \| 624 pages \| PDF \| 22 Mb
	Science/Engineering Device Electronics for Integrated Circuits Solutions Manual Device Electronics for Integrated Circuits Solutions Manual Wiley \| July 1986 \| ISBN-10: 0471839760 \| 142 pages \| PDF \| 3.94 mbThis book provides all the required information for a course in modern device electronics taken by undergraduate ...
	Science/Engineering Device Electronics for Integrated Circuits Device Electronics for Integrated CircuitsBy Richard S. Muller, Theodore I. Kamins, Mansun ChanPublisher:John Wiley & Sons; 3rd edition \| 2002 \| 560 Pages \| ISBN: 0471428779 \| PDF \| 178.08 MB“Focusing specifically on silicon devic ...
	Computational Electronics: Semi-Classical and Quantum Device Modeling and Simulation Computational Electronics: Semi-Classical and Quantum Device Modeling and SimulationISBN: 1420064835 Publisher: CRC Press Author: Dragica Vasileska, Stephen M. Goodnick, Gerhard KlimeckDescription:Covering classical and quantum transpor ...
	Science/Engineering Applications of Laser-Plasma Interactions (Plasma Physics) Author: Publisher: Taylor & Francis (2008)Binding: Hardcover, 272 pagespricer: $129.95ISBN-10: 0849376041editorialreviewsRecent advances in the development of lasers with more energy, power, and brightness have opened up new possibiliti ...

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