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Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly

Posted on 2010-03-15




Name:Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly
ASIN/ISBN:3527406336
Language:English
File size:5 Mb
Publisher: Wiley
Pages: 315
Publish Date: 2007-09-17
ISBN: 3527406336
File Type: PDF
File Size: 5 MB
   Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly

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In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

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