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Technical Optical Inspection of Microsystems (Optical Science and Engineering)

Posted on 2010-04-20




Name:Technical Optical Inspection of Microsystems (Optical Science and Engineering)
ASIN/ISBN:0849336821
Author:onno
File size:1.5 Mb
   Technical Optical Inspection of Microsystems (Optical Science and Engineering)

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ISBN: 0849336821 Publisher: CRC Press Author:

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Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and

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