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Nanoscale Calibration Standards and Methods
Posted on 2010-04-13
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More The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" HOTFILE:
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 | Nanoscale Calibration Standards and Methods by Günter Wilkening Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range by Günter WilkeningPublisher: Wiley-VCH (August 19, 2005) | ISBN: 352740502X | Pages: 541 | PDF | 13.2 MBThe quantitative d ... |
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