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Science/Engineering Nanofabrication: Principles, Capabilities and Limits (Repost)

Posted on 2010-06-16




Name:Science/Engineering Nanofabrication: Principles, Capabilities and Limits (Repost)
ASIN/ISBN:0387755764
Publisher:Springer
Publish Date:edition 2008
Pages:343 pages
File size:10.9 Mb
Publisher: Springer
ISBN: 0387755764
Publish Date: edition 2008
File Type: PDF
Pages: 343 pages
File Size: 10,9 mb
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Nanofabrication: Principles, Capabilities and Limits

Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed.

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