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Science/Engineering Statistical Mechanics, Third Edition
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Science/Engineering Microsystem Technology

Posted on 2010-03-16




Name:Science/Engineering Microsystem Technology
ASIN/ISBN:3527296344
Language:English
File size:28.1 Mb
Publish Date: 2001-02-15
ISBN: 3527296344
Pages: 512 pages
File Type: PDF
File Size: 28,1 MB
Other Info: Wiley-VCH
   Science/Engineering Microsystem Technology

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Wolfgang Menz, Jurgen Mohr, Oliver Paul, "Microsystem Technology"

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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