Science/Engineering Microlithography: Science and Technology Second Edition (0824790243)

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Microlithography: Science and Technology Second Edition Publisher: TF-CRC

Number Of Pages: 864

Publication Date: 2007-05-11

Sales Rank: 668270

ISBN / ASIN: 0824790243

EAN: 9780824790240

Binding: Hardcover

Manufacturer: TF-CRC

Studio: TF-CRC

Average Rating: 5

Like the bestselling original, this second edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices. Reflecting recently developed technologies, this edition includes coverage of immersion lithography, extreme ultraviolet (EUV) lithography, imprint lithography, photoresists for 193nm and immersion lithography, and scatterometry. The authors cover mechanical systems, optics, excimer laser light sources, and alignment techniques and analysis, as well as resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, and metrology.

Review: A quick review A great book that gives a quick overview from contact printing and projection aligners (1970's and early 1980's technology), but it spends most of its time and effort on the more recent (2000's) technology and processes. There was information packed into each page, providing both an overview and detail into the more recent development of lithography. It helps to have some previous exposure to lithography as well as the topics of physics, optics, and chemistry since the book will build on all of these subjects to provide the basis of the newer technology. Buy Book at Lowest Price on Amazon

Rating:
2.5 out of 5 by Book123

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	Study Microlithography: Science and Technology Second Edition (Opitcal Science and Engineering) Microlithography: Science and Technology Second Edition (Opitcal Science and Engineering) Publisher:TF-CRC(2007-05-11) \| ISBN-10:0824790243 \| PDF \| 7.3 Mb \| 864 pageLike the bestselling original, this second edition of Microlithography is a ...
	Family & Home Wine Science, Third Edition (Food Science and Technology) Ronald S. Jackson "Wine Science, Third Edition (Food Science and Technology)"Academic Press \| 2008-03-17 \| ISBN: 0123736463 \| 776 pages \| PDF \| 17 MBUnderstand the three pillars of wine science---- grape culture, wine production, and sensor ...
	Science/Engineering Microlithography/Molecular Imprinting Series: Advances in Polymer Science, Vol. 172 Microlithography/Molecular Imprinting Series: Advances in Polymer Science, Vol. 172 Publisher: Springer \| ISBN: 3540218623 \| 2005 \| Pages: 276 \| PDF \| 4.2 MBTable of contents1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art a ...
	Science/Engineering Corrosion Science and Technology, Second Edition (Materials Science & Technology) Corrosion Science and Technology, Second Edition (Materials Science & Technology) Publisher: CRC \| ISBN: 0849392489 \| edition 2007 \| PDF \| 552 pages \| 2,83 mbThis second edition has been newly updated and expanded to present the very lates ...
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