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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

Posted on 2010-03-16




Name:MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness
ASIN/ISBN:0387095357
Language:English
File size:12.3 Mb
Publish Date: 2008
ISBN: 0387095357
Pages: 260 pages
File Type: PDF
File Size: 12,3 MB
Other Info: Springer
   MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes.

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