Lithography Process Control rar (0819430528)

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By Harry J. Levinson

Covers at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.

Contents

Preface
Introduction to the use of statistical process control in lithography
Sampling
Simple and complex processes
Linewidth control
Overlay
Yield
Process drift and automatic process control
Metrology
Control of operations

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