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More Handbook of Silicon Semiconductor Metrology Handbook of Silicon Semiconductor Metrology

By: Alain C. Diebold(Editor)

ISBN-10: 0824705068 ISBN-13: 9780824705060

Publisher: CRC - 2001-06-29

Editorial Review: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies. Table of Contents:

Preface

Acknowledgments

Contributors

1 Silicon Semiconductor Metrology 1

2 Gate Dielectric Metrology 17

3 Metrology for Ion Implantation 49

4 MOS Device Characterization 59

5 Carrier Illumination Characterization of Ultra-Shallow Implants 97

6 Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requirements for a 0.18-m NMOSFET 117

7 Overview of Metrology for On-Chip Interconnect 143

8 Metrology for On-Chip Interconnect Dielectrics 149

9 Thin-Film Metrology Using Impulsive Stimulated Thermal Scattering (ISTS) 167

10 Metal Interconnect Process Control Using Picosecond Ultrasonics 197

11 Sheet Resistance Measurements of Interconnect Films 215

12 Characterization of Low-Dielectric Constant Materials 245

13 High-Resolution Profilometry for CMP and Etch Metrology 279

14 Critical-Dimension Metrology and the Scanning Electron Microscope 295

15 Scanned Probe Microscope Dimensional Metrology 335

16 Electrical CD Metrology and Related Reference Materials 377

17 Metrology of Image Placement 411

18 Scatterometry for Semiconductor Metrology 477

19 Unpatterned Wafer Defect Detection 515

20 Particle and Defect Characterization 547

21 Calibration of Particle Detection Systems 583

22 In Situ Metrology 601

23 Metrology Data Management and Information Systems 679

24 Statistical Metrology, with Applications to Interconnect and Yield Modeling 705

25 Physics of Optical Metrology of Silicon-Based Semiconductor Devices 723

26 Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflectometry and Ellipsometry 761

27 Analysis of Thin-Layer Structures by X-Ray Reflectometry 789

28 Ion Beam Methods 811

29 Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials 851

30 Status of Lithography Metrology as of the End of 2000 865

Index 869

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