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Science/Engineering Fundamentals of Semiconductor Manufacturing and Process Control

Posted on 2010-03-15




Name:Science/Engineering Fundamentals of Semiconductor Manufacturing and Process Control
ASIN/ISBN:0471784060
Language:English
File size:4.2 Mb
   Science/Engineering Fundamentals of Semiconductor Manufacturing and Process Control

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ISBN: 0471784060

Title: Fundamentals of Semiconductor Manufacturing and Process Control

Author: Gary S. May Costas J. Spanos

Publisher: Wiley-IEEE Press

Publication Date: 2006-05-22

Number Of Pages: 463

Average Amazon Rating: 4.0

4.2 Mb pdf

A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following

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