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Science/Engineering Essentials of Toxic Chemical Risk: Science and Society
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Science/Engineering Advances in Chemical Physics - Volume 15: Stochastic Processes in Chemical Physics
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Science/Engineering Foundations of MEMS
Posted on 2010-03-16
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Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology – all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
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