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Science/Engineering Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)

Posted on 2010-03-16




Name:Science/Engineering Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)
ASIN/ISBN:0387233105
Language:English
File size:6.6 Mb
Publish Date: 2005-03-03
ISBN: 0387233105
Pages: 414 pages
File Type: PDF
File Size: 6,6 MB
Other Info: Springer
   Science/Engineering Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)



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N. Setter "Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)"

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

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