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An Introduction to Microelectromechanical Systems Engineering

Posted on 2010-04-14




Name:An Introduction to Microelectromechanical Systems Engineering
ASIN/ISBN:0890065810
File size:3.6 Mb
Publisher: Artech House Publishers
ISBN: 0890065810
Publish Date: December 1999
Pages: 265 Pages
   An Introduction to Microelectromechanical Systems Engineering

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Nadim Maluf, “”

This second edition brings readers up-to-date with the latest developement in this cutting-edge areas. Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS.

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