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Evgeni Gusev, Eric Garfunkel, Arthur Dideikin, "Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators"

The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.

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	Science/Engineering Micro and Nano Technologies in Bioanalysis: Methods and Protocols Micro and Nano Technologies in Bioanalysis: Methods and ProtocolsHumana Press \| ISBN: 1934115401 \| 2009-06-18 \| PDF \| 597 pages \| 7 Mb In recent years, large-scale advances in technology have led to greater understanding of the world on a m ...
	Science/Engineering Micromixers: Fundamentals, Design, and Fabrication (Micro & Nano Technologies) Nam-Trung Nguyen, "Micromixers: Fundamentals, Design, and Fabrication (Micro & Nano Technologies)"William Andrew Publishing \| 2008-03-14 \| ISBN: 081551543X \| 300 pages \| PDF \| 5,4 MBA wide range of applications in chemistry and bioc ...
	Science/Engineering Applied Nanotechnology (Micro and Nano Technologies) Jeremy Ramsden, "Applied Nanotechnology (Micro and Nano Technologies)" William Andrew 2009 \| ISBN-10: 0815520239 \| 250 Pages \| PDF \| 1,1 MB This book joins, for the first time, technical nanotechnology information with the non-technical t ...
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	Technical Reliability of MEMS: Testing of Materials and Devices (Advanced Micro and Nanosystems) Author: Publisher: Wiley-VCH (2008)Binding: Hardcover, 324 pagespricer: $230.00ISBN-10: 3527314946editorialreviewsThis first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microe ...

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