Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects (1604564512)

Like Book123?! Give us +1

Free register and download UseNet downloader, then you can FREE Download from UseNet.

Download without Limit " Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects " from UseNet for FREE!

More

Rene Hubner "Advanced Ta-Based Diffusion Barriers for Cu Interconnects"

During the last few years, copper has become the standard metallisation material for on-chip interconnects in high-performance microprocessors. Compared to the previously used aluminium, copper shows not only a lower resistivity, but also significantly improved electromigration resistance. Copper ions, however, are very mobile in silicon and many dielectric materials under electrical and thermal bias. Thus, barrier layers are needed to prevent Cu diffusion into the insulating layers surrounding the metallic interconnects. Since Ta-based compounds are characterized by a high thermal stability, pure Ta films or layer stacks consisting of Ta and TaN are used for such barriers.The continuous scaling down of the interconnect dimensions and, therefore, the essential decrease in the barrier layer thickness coupled with the replacement of silicon oxide by advanced low-k dielectrics demand further improvements of the diffusion barrier performance. It is the aim of this book to carry out microstructure and functional property investigations for advanced, high-performance Tabased diffusion barriers (Ta-TaN layer stacks and Ta-Si-N single layers) before and after annealing to compare their thermal stabilities and to probe the corresponding failure mechanisms. For the Ta-TaN barriers, these studies are undertaken for a range of layer sequences, while for the Ta-Si-N barriers a variety of films with different chemical compositions are analysed.

To start Buy Book at Lowest Price on Amazon

download free click HERE:

>>> Download many interesting free eBooks HERE <<<

No another mirrors, please! >>> Read RULES

Rating:
2.5 out of 5 by Book123

Download Links
Server	Status
Direct Download Link 1	Alive
Direct Download Link 2	Alive
Download Link (Download)	Alive
Download Link (Mirror)	Alive
Download Link (Mirror)	Alive
Download Link (Mirror)	Alive
Buy This Book at Best Price >>

Like this article?! Give us +1:

	Science/Engineering Diffusion in Solids: Fundamentals, Methods, Materials, Diffusion-Controlled Processes Helmut Mehrer, "Diffusion in Solids: Fundamentals, Methods, Materials, Diffusion-Controlled Processes"Springer; 1 edition (August 24, 2007) \| ISBN:3540714863 \| 654 pages \| PDF \| 9,2 Mb ORMIRROR :
	Programming E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices Mehdi Khosrow-Pour, "E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices" Information Science Reference \| 2008-11-18 \| ISBN: 1605661309 \| 394 pages \| PDF \| 8,7 MB As governmental entities face accelerating public d ...
	Science/Engineering Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications Advanced Nanoscale ULSI Interconnects: Fundamentals and ApplicationsSpringer \| 2009-11-25 \| ISBN: 0387958673 \| 552 pages \| PDF \| 16 MBThis book presents one of the new frontiers of modern electrochemistry science and technology: electrochem ...
	Study Positive Harmonic Functions and Diffusion (Cambridge Studies in Advanced Mathematics) Ross G. Pinsky "Positive Harmonic Functions and Diffusion (Cambridge Studies in Advanced Mathematics)"Cambridge University Press \| English \| 1995-04-28 \| ISBN: 0521470145 \| 492 pages \| DJVU \| 2 MBIn this book, Professor Pinsky gives a self- ...
	Hospital-Based Integrative Medicine: A Case Study of the Barriers and Factors Facilitating the Creation of a Center Ian D. Coulter, "Hospital-Based Integrative Medicine: A Case Study of the Barriers and Factors Facilitating the Creation of a Center " RAND Corporation \| 2008 \| ISBN: 0833045598 \| 192 pages \| PDF \| 1 MB This study tracks the establishme ...
	Law & Politics Lyrics: E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices Mehdi Khosrow-Pour, "E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices" Information Science Reference \| 2008-11-18 \| ISBN: 1605661309 \| 394 pages \| PDF \| 8,7 MB As governmental entities face accelerating public d ...

Share this page with your friends now!
Text link
Forum (BBCode)
Website (HTML)

DISCLAIMER:

This site does not store Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects on its server. We only index and link to Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects provided by other sites. Please contact the content providers to delete Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects if any and email us, we'll remove relevant links or contents immediately.

	Science/Engineering Diffusion in Solids: Fundamentals, Methods, Materials, Diffusion-Controlled Processes Helmut Mehrer, "Diffusion in Solids: Fundamentals, Methods, Materials, Diffusion-Controlled Processes"Springer; 1 edition (August 24, 2007) \| ISBN:3540714863 \| 654 pages \| PDF \| 9,2 Mb ORMIRROR :
	Programming E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices Mehdi Khosrow-Pour, "E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices" Information Science Reference \| 2008-11-18 \| ISBN: 1605661309 \| 394 pages \| PDF \| 8,7 MB As governmental entities face accelerating public d ...
	Science/Engineering Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications Advanced Nanoscale ULSI Interconnects: Fundamentals and ApplicationsSpringer \| 2009-11-25 \| ISBN: 0387958673 \| 552 pages \| PDF \| 16 MBThis book presents one of the new frontiers of modern electrochemistry science and technology: electrochem ...
	Study Positive Harmonic Functions and Diffusion (Cambridge Studies in Advanced Mathematics) Ross G. Pinsky "Positive Harmonic Functions and Diffusion (Cambridge Studies in Advanced Mathematics)"Cambridge University Press \| English \| 1995-04-28 \| ISBN: 0521470145 \| 492 pages \| DJVU \| 2 MBIn this book, Professor Pinsky gives a self- ...
	Hospital-Based Integrative Medicine: A Case Study of the Barriers and Factors Facilitating the Creation of a Center Ian D. Coulter, "Hospital-Based Integrative Medicine: A Case Study of the Barriers and Factors Facilitating the Creation of a Center " RAND Corporation \| 2008 \| ISBN: 0833045598 \| 192 pages \| PDF \| 1 MB This study tracks the establishme ...
	Law & Politics Lyrics: E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices Mehdi Khosrow-Pour, "E-Government Diffusion, Policy, and Impact: Advanced Issues and Practices" Information Science Reference \| 2008-11-18 \| ISBN: 1605661309 \| 394 pages \| PDF \| 8,7 MB As governmental entities face accelerating public d ...

Book123

Categories

Share With Friends

Archive by Date

Search Tag

Newest

Useful Links

Science/Engineering Advanced Ta-Based Diffusion Barriers for Cu Interconnects

Related Articles

DISCLAIMER:

Comments (0) All